Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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63 results for J. Demarest

Electrodeposited Cu film morphology on thin PVD Cu seed layers
- - James J. Kelly
  - X. Lin
  - et al.
- 2013
- ECS Transactions
Electrolyte additive chemistry and feature size-dependent impurity incorporation for Cu interconnects
- - James J. Kelly
  - Takeshi Nogami
  - et al.
- 2011
- ECS Meeting 2011
56 nm pitch copper dual-damascene interconnects with triple pitch split metal and double pitch split via
- - James Hsueh-Chung Chen
  - Christopher Waskiewicz
  - et al.
- 2012
- IITC 2012
Modifications of growth of strained silicon and dopant activation in silicon by cryogenic ion implantation and recrystallization annealing
- - Hiroshi Itokawa
  - Nathaniel C. Beriiner
  - et al.
- 2012
- IWJT 2012
Sub-25nm FinFET with advanced fin formation and short channel effect engineering
- - Tenko Yamashita
  - Veeraraghvan S. Basker
  - et al.
- 2011
- VLSI Technology 2011
ETSOI CMOS for system-on-chip applications featuring 22nm gate length, sub-100nm gate pitch, and 0.08μm² SRAM cell
- - Kangguo Cheng
  - A. Khakifirooz
  - et al.
- 2011
- VLSI Technology 2011
ETSOI CMOS for system-on-chip applications featuring 22nm gate length, sub-100nm gate pitch, and 0.08μm² SRAM cell
- - Kangguo Cheng
  - A. Khakifirooz
  - et al.
- 2011
- VLSI Circuits 2011
Impact of back bias on ultra-thin body and BOX (UTBB) devices
- - Q. Liu
  - Frederic Monsieur
  - et al.
- 2011
- VLSI Technology 2011
A 0.063 μm² FinFET SRAM cell demonstration with conventional lithography using a novel integration scheme with aggressively scaled fin and gate pitch
- - Veeraraghvan S. Basker
  - Theodorus E. Standaert
  - et al.
- 2010
- VLSI Technology 2010
Challenges and solutions of extremely thin SOI (ETSOI) for CMOS scaling to 22nm node and beyond
- - Kangguo Cheng
  - Ali Khakifirooz
  - et al.
- 2010
- CSTIC 2010