Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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55 results for Son Van Nguyen

Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- - D. Edelstein
  - H.S. Rathore
  - et al.
- 2004
- IRPS 2004
Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- - D. Edelstein
  - H.S. Rathore
  - et al.
- 2004
- IRPS 2004
Area-Selective Deposition of Tantalum Nitride with Polymerizable Monolayers: From Liquid to Vapor Phase Inhibitors
- - Krystelle Lionti
  - Noel Arellano
  - et al.
- 2022
- Chemistry of Materials
Improved Air Spacer for Highly Scaled CMOS Technology
- - Kangguo Cheng
  - Chanro Park
  - et al.
- 2020
- IEEE Transactions on Electron Devices
Low hydrogen silicon carbon nitride cap for high performance sub-10 nm Cu-low k interconnect
- - Son Van Nguyen
  - Shobha Hosadugra
  - et al.
- 2017
- ECS J. Solid State Sci. Technol.
Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects
- - Deepika Priyadarshini
  - Son Van Nguyen
  - et al.
- 2017
- JVSTB
Tailoring capping layers to reduce stress gradients in copper metallization
- - Conal E. Murray
  - Deepika Priyadarshini
  - et al.
- 2016
- Applied Physics Letters
Linking strain anisotropy and plasticity in copper metallization
- - Conal E. Murray
  - Jean L. Jordan-Sweet
  - et al.
- 2015
- Applied Physics Letters
Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects - State of the art
- - Alfred Grill
  - Stephen M. Gates
  - et al.
- 2014
- Applied Physics Reviews
CVD of fluorosilicate glass for ULSI applications
- - M.J. Shapiro
  - S. Nguyen
  - et al.
- 1995
- Thin Solid Films