Reliability, yield, and performance of a 90 nm SOI/Cu/SiCOH technology
- D. Edelstein
- C.R. Davis
- et al.
- 2004
- IITC 2004
Publications
59 results for Son Van Nguyen
Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- D. Edelstein
- H.S. Rathore
- et al.
- 2004
- IRPS 2004
Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- D. Edelstein
- H.S. Rathore
- et al.
- 2004
- IRPS 2004
CVD of fluorosilicate glass for ULSI applications
- M.J. Shapiro
- S. Nguyen
- et al.
- 1995
- Thin Solid Films
Advanced metallization technology for 256M DRAM
- P. Kücher
- H. Aochi
- et al.
- 1995
- Applied Surface Science
Novel fingered stacked capacitor cell
- Tue Nguyen
- S. Nguyen
- et al.
- 1995
- JES
High Selectivity Magnetically Enhanced Reactive Ion Etching of Boron Nitride Films
- Bernhard Neureither
- Son Nguyen
- et al.
- 1994
- JES
Evidence of a shallow junction formation from plasma enhanced chemical vapor deposition of boron nitride and silicon boron nitride
- Tue Nguyen
- Son Van Nguyen
- et al.
- 1993
- Applied Physics Letters
New leakage mechanism in sub-5-nm oxynitride dielectrics
- Tue Nguyen
- Daniel A. Carl
- et al.
- 1993
- Applied Physics Letters