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Rüdiger Berger- 1998
- Applied Physics A: Materials Science and Processing
- R. Berger
- E. Delamarche
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
- Hans Loeschner
- Gerhard Stengl
- et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
- A. Dietzel
- R. Berger
- et al.
- 2002
- Sensors and Actuators, A: Physical
- Andreas Dietzel
- Rüdiger Berger
- et al.
- 2002
- IEEE Transactions on Magnetics
- P. Mächtle
- R. Berger
- et al.
- 2001
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
- 2000
- Applied Physics Letters
- 1998
- Applied Physics Letters
- J. Fompeyrine
- R. Berger
- et al.
- 1998
- Applied Physics Letters