Improved performance of large stroke comb-drive actuators by using a stepped finger shape
- J.B.C. Engelen
- M.A. Lantz
- et al.
- 2009
- TRANSDUCERS 2009
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2 results for Miko C. Elwenspoek
Nanopositioner actuator energy cost and performance
- Johan B. C. Engelen
- Mohammed G. Khatib
- et al.
- 2013
- Sensors and Actuators, A: Physical