Modeling polarization for Hyper-NA lithography tools and masks
- Kafai Lai
- Alan E. Rosenbluth
- et al.
- 2007
- SPIE Advanced Lithography 2007
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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13 results for Jason Meiring
Mesoscale modeling for SFIL simulating polymerization kinetics and densification
- Ryan L. Burns
- Stephen C. Johnson
- et al.
- 2004
- Microlithography 2004
22-nm-node technology active-layer patterning for planar transistor devices
- Ryoung-Han Kim
- Steven Holmes
- et al.
- 2010
- J. Micro/Nanolithogr. MEMS MOEMS