Reducing density-induced CMP non-uniformity for advanced semiconductor technology nodes
- John H. Zhang
- Wei-Tsu Tseng
- et al.
- 2013
- MRS Spring Meeting 2013
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5 results for Cindy Goldberg
Cu CMP and its challenge for 20nm nodes and beyond
- John H. Zhang
- Wei-Tsu Tseng
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- MRS Spring Meeting 2012
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- MRS Spring Meeting 2011
32nm general purpose bulk CMOS technology for high performance applications at low voltage
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- 2008
- IEDM 2008
High performance bulk planar 20nm CMOS technology for low power mobile applications
- Huiling Shang
- Sameer Jain
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- 2012
- VLSI Technology 2012