Moisture-insensitive polycarbosilane films with superior mechanical properties
- Y. Matsuda
- J.S. Rathore
- et al.
- 2012
- ACS AMI
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New classes of ULK dielectrics with superior thermomechanical properties
- Yusuke Matsuda
- Sean W. King
- et al.
- 2011
- ADMETA 2011