Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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5 results for B.Y. Kim

High reliability 32 nm Cu/ULK BEOL based on PVD CuMn seed, and its extendibility
- - Takeshi Nogami
  - Tibor Bolom
  - et al.
- 2010
- IEDM 2010
Effects of Al and Mn impurities on Cu electromigration
- - C.-K. Hu
  - J. Ohm
  - et al.
- 2011
- ADMETA 2011
Effect of impurity on Cu electromigration
- - C.-K. Hu
  - Matthew Angyal
  - et al.
- 2010
- International Workshop STRESS-INDUCED PHENOMENA IN METALLIZATION 2010
CVD Co and its application to Cu damascene interconnections
- - Takeshi Nogami
  - J. Maniscalco
  - et al.
- 2010
- IITC 2010
Electromigration in Cu(Al) and Cu(Mn) damascene lines
- - C.-K. Hu
  - J. Ohm
  - et al.
- 2012
- Journal of Applied Physics