The effects of plasma exposure on low-k dielectric materials
- J.L. Shohet
- H. Ren
- et al.
- 2012
- SPIE Advanced Lithography 2012
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3 results for V. Ryan
CVD Co and its application to Cu damascene interconnections
- Takeshi Nogami
- J. Maniscalco
- et al.
- 2010
- IITC 2010
The effects of vacuum ultraviolet radiation on low-k dielectric films
- H. Sinha
- H. Ren
- et al.
- 2012
- Journal of Applied Physics