Scalability of Direct Silicon Bonded (DSB) technology for 32nm node and beyond
- Haizhou Yin
- C.Y. Sung
- et al.
- 2007
- VLSI Technology 2007
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23 results for Mariko Takayanagi
Extendibility of NiPt silicide contacts for CMOS technology demonstrated to the 22-nm node
- Kazuya Ohuchi
- Christian Lavoie
- et al.
- 2007
- IEDM 2007
Challenge for high-k/metal gate CMOSFETs in 32 nm generation and beyond
- M. Takayanagi
- 2007
- ECS Meeting 2007