Integration of direct plating of Cu onto a CVD Ru liner
- S. Malhotra
- D. Canaperi
- et al.
- 2004
- AMC 2004
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23 results for Shom Ponoth
Processing dependent thermal conductivity of nanoporous silica xerogel films
- Anurag Jain
- Svetlana Rogojevic
- et al.
- 2002
- Journal of Applied Physics
Porous silica materials as low-k dielectrics for electronic and optical interconnects
- A. Jain
- S. Rogojevic
- et al.
- 2001
- Thin Solid Films