Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for Kang Yi Lin

Significance of plasma-photoresist interactions for atomic layer etching processes with extreme ultraviolet photoresist
- - Adam Pranda
  - Kang Yi Lin
  - et al.
- 2020
- JVSTA
Selective atomic layer etching of HfO₂ over silicon by precursor and substrate-dependent selective deposition
- - Kang Yi Lin
  - Chen Li
  - et al.
- 2020
- JVSTA
Achieving ultrahigh etching selectivity of SiO₂ over Si₃N₄ and Si in atomic layer etching by exploiting chemistry of complex hydrofluorocarbon precursors
- - Kang Yi Lin
  - Chen Li
  - et al.
- 2018
- JVSTA