Fast source independent estimation of lithographic difficulty supporting large scale source optimization
- David Demaris
- Maria Gabrani
- et al.
- 2012
- SPIE Advanced Lithography 2012
Publications
Date
Featured collections
Popular topics
2 results for Sankha Subhra Sarkar
High-resolution Fresnel zone plate fabrication by achromatic spatial frequency multiplication with extreme ultraviolet radiation
- Sankha Subhra Sarkar
- Harun H. Solak
- et al.
- 2011
- Optics Letters