Patterned cracks improve yield in the release of compliant microdevices from silicon-on-insulator wafers
- G.C. Hill
- J.I. Padovani
- et al.
- 2011
- JMM
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18 results for B.W. Chui
Magnetic resonance force microscopy of nuclear spins: Detection and manipulation of statistical polarization
- H.J. Mamin
- R. Budakian
- et al.
- 2005
- Physical Review B - CMMP
Intrinsic-carrier thermal runaway in silicon microcantilevers
- B.W. Chui
- M. Asheghi
- et al.
- 1999
- Microscale Thermophysical Engineering
Ultrahigh-density atomic force microscopy data storage with erase capability
- G. Binnig
- M. Despont
- et al.
- 1999
- Applied Physics Letters
Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever
- B.W. Chui
- T.W. Kenny
- et al.
- 1998
- Applied Physics Letters
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
- Benjamin W. Chui
- Timothy D. Stowe
- et al.
- 1998
- JMEMS
A novel dual-axial AFM cantilever with independent piezoresistive sensors for simultaneous detection of lateral and vertical forces
- Benjamin W. Chui
- Thomas W. Kenny
- et al.
- 1997
- IMECE 1997
Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope
- B.W. Chui
- T.D. Stowe
- et al.
- 1996
- Applied Physics Letters