Self-aligned S/D regions for InGaAs MOSFETs
- Lukas Czornomaz
- Mario El Kazzi
- et al.
- 2011
- ESSDERC 2011
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2 results for P. Mächler
CMOS compatible self-aligned S/D regions for implant-free InGaAs MOSFETs
- L. Czornomaz
- M. El Kazzi
- et al.
- 2012
- Solid-State Electronics