Publications

3 results for Yunfei Deng

EUV OPC for 56 nm metal pitch
- - Martin Burkhardt
  - Matt Colburn
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Exposure tool settings and OPC strategies for EUV Lithography at the 16nm node
- - Yunfei Deng
  - Jongwook Kye
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Overcoming the challenges of 22-nm node patterning through litho-design co-optimization
- - Martin Burkharde
  - J.C. Arnold
  - et al.
- 2009
- SPIE Advanced Lithography 2009