Publications

5 results for Yuri Granik

Total Source Mask Optimization: High-capacity, resist modeling, and production-ready mask solution
- - Moutaz Fakhry
  - Yuri Granik
  - et al.
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
- - David Melville
  - Alan E. Rosenbluth
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Intensive optimization of masks and sources for 22nm lithography
- - Alan E. Rosenbluth
  - David O. Melville
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Lithography 2003