Characterization of hydrogenated amorphous silicon thin-film solar cell defects using optical beam induced current imaging and focused ion beam cross-sectioning technique
- Lei Meng
- S.E. Steen
- et al.
- 2011
- PVSC 2011
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Development, characterization and interface engineering of films for enhanced amorphous silicon solar cell performance
- P. Joshi
- Steven E. Steen
- et al.
- 2010
- PVSC 2010
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- M. Guillorn
- J. Chang
- et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures