Front-end-of-line quadrature-clocked voltage-dependent capacitance measurement
- Stas Polonsky
- Paul Solomon
- et al.
- 2011
- ICMTS 2011
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New tools and methodology for advanced parametric and defect structure test
- Raphael Robertazzi
- Louis Medina
- et al.
- 2010
- IEEE ITC 2010