Publications

2 results for Liyan Miao

Directed self-assembly defectivity assessment. Part II
- - Chris Bencher
  - He Yi
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Self-assembly patterning for sub-15nm half-pitch: A transition from lab to fab
- - Chris Bencher
  - Jeffrey Smith
  - et al.
- 2011
- SPIE Advanced Lithography 2011