Fixed-structure discrete-time ℋ∞ controller synthesis with HIFOO
- Andrey P. Popov
- Herbert Werner
- et al.
- 2010
- CDC 2010
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Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
- David O. S. Melville
- Alan E. Rosenbluth
- et al.
- 2011
- Journal of Vacuum Science and Technology B