Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- Laurent Dellmann
- Sylvian Roth
- et al.
- 1998
- Sensors and Actuators, A: Physical
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15 results for Nico De Rooij
Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
- Terunobu Akiyama
- Andreas Tonin
- et al.
- 1998
- Sensors and Actuators, A: Physical
Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- Microelectronic Engineering
Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
- N. Blanc
- J. Brugger
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- Michel Despont
- Gilles Beljakovic
- et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers