Very high performance 50 nm CMOS at low temperature
- S.J. Wind
- L.T. Shi
- et al.
- 1999
- IEDM 1999
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34 results for P. Kozlowski
Sub-30 nm abrupt P+ junction formation with Ge preamorphization and high energy Si co-implantation
- K.L. Lee
- Ted Zabel
- et al.
- 1999
- MRS Spring Meeting 1999
Transient enhanced diffusion and dose loss of indium in silicon
- Omer Dokumaci
- Paul Ronsheim
- et al.
- 1999
- MRS Spring Meeting 1999
Polycrystalline silicon formation by pulsed rapid thermal annealing of amorphous silicon
- Yue Kuo
- P. Kozlowski
- 1996
- Applied Physics Letters