Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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13 results for C. Dziobkowski

Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- - D. Edelstein
  - H.S. Rathore
  - et al.
- 2004
- IRPS 2004
Cleans for Al vias in a 0.175 μm Dual Damascene Process
- - J.P. Gambino
  - L. Clevenger
  - et al.
- 1999
- IITC 1999
Effect of oxygen at the Cu-SiC_xN_y interface on electromigration performance of interconnect structures
- - E. Liniger
  - C. Dziobkowski
- 2006
- Thin Solid Films