Characterization of contact module failure mechanisms for SOI technology using E-beam inspection and in-line TEM
- Xing J. Zhou
- Oliver D. Patterson
- et al.
- 2010
- ASMC 2010
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.