Modeling and identification of the dynamics of electrostatically actuated Microcantilever with integrated thermal sensor
- Pranav Agarwal
- Deepak Sahoo
- et al.
- 2008
- CDC 2008
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Real-time models of electrostatically actuated cantilever probes with integrated thermal sensor for nanoscale interrogation
- Pranav Agarwal
- Deepak R. Sahoo
- et al.
- 2010
- JMEMS