Modeling and identification of the dynamics of electrostatically actuated Microcantilever with integrated thermal sensor
- Pranav Agarwal
- Deepak Sahoo
- et al.
- 2008
- CDC 2008
Publications
Date
Featured collections
Popular topics
3 results for Murti V. Salapaka
Real-time models of electrostatically actuated cantilever probes with integrated thermal sensor for nanoscale interrogation
- Pranav Agarwal
- Deepak R. Sahoo
- et al.
- 2010
- JMEMS
A review of the systems approach to the analysis of dynamic-mode atomic force microscopy
- Abu Sebastian
- Anil Gannepalli
- et al.
- 2007
- IEEE TCST