Publications

9 results for D. Deduytsche

In situ X-ray diffraction study of thin film Ir/Si solid state reactions
- - W. Knaepen
  - J. Demeulemeester
  - et al.
- 2010
- Microelectronic Engineering
Simultaneous real-time x-ray diffraction spectroscopy, Rutherford backscattering spectrometry, and sheet resistance measurements to study thin film growth kinetics by Kissinger plots
- - D. Smeets
  - J. Demeulemeester
  - et al.
- 2008
- Journal of Applied Physics
Formation and stability of NiSi in the presence of Co and Fe alloying elements
- - D. Deduytsche
  - C. Detavernier
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Nucleation and diffusion during growth of ternary Co1-x Nix Si2 thin films studied by complementary techniques in real time
- - D. Smeets
  - J. Demeulemeester
  - et al.
- 2008
- Journal of Applied Physics
Effect of Pt addition on growth stress and thermal stress of NiSi films
- - C. Van Bockstael
  - K. De Keyser
  - et al.
- 2008
- Journal of Applied Physics
Formation and morphological stability of NiSi in the presence of W, Ti, and Ta alloying elements
- - D. Deduytsche
  - C. Detavernier
  - et al.
- 2007
- Journal of Applied Physics
Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions
- - K. Opsomer
  - D. Deduytsche
  - et al.
- 2007
- Applied Physics Letters
Influence of alloying elements on the formation and stability of NiSi
- - C. Detavernier
  - D. Deduytsche
  - et al.
- 2006
- ECS Meeting 2006
High-temperature degradation of NiSi films: Agglomeration versus NiSi ₂ nucleation
- - D. Deduytsche
  - C. Detavernier
  - et al.
- 2005
- Journal of Applied Physics