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Mark C. Hakey- James R. Schwank
- Marty R. Shaneyfelt
- et al.
- 2009
- RADECS 2009
- Jonathan A. Pellish
- Michael A. Xapsos
- et al.
- 2009
- RADECS 2009
- John G. Maltabcs
- Steven J. Holmes
- et al.
- 1990
- Microlithography 1990
- Donald C. Hofer
- Grant Willson
- et al.
- 1989
- Proceedings of SPIE 1989
- Jonathan A. Pellish
- Michael A. Xapsos
- et al.
- 2010
- IEEE TNS
- James R. Schwank
- Marty R. Shaneyfelt
- et al.
- 2010
- IEEE TNS
- David F. Heidel
- Paul W. Marshall
- et al.
- 2009
- IEEE TNS
- David F. Heidel
- Paul W. Marshall
- et al.
- 2008
- IEEE TNS