Mesoscale modeling for SFIL simulating polymerization kinetics and densification
- Ryan L. Burns
- Stephen C. Johnson
- et al.
- 2004
- Microlithography 2004
Publications
Date
Featured collections
Popular topics
104 results for C. Grant Willson
Formation of deprotected fuzzy blobs in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
Synthesis and Properties of Diazopiperidiones for Use in Nonchemically Amplified Deep UV Photoresists
- Peter I. Tattersall
- David Breslin
- et al.
- 2004
- Chemistry of Materials
Diffusion induced line edge roughness
- Michael D. Stewart
- Gerard M. Schmid
- et al.
- 2003
- Microlithography 2003
Deprotection volume characteristics and line edge morphology in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2003
- Microlithography 2003
Polymeric liquid crystals: structural basis for ferroelectric and nonlinear optical properties
- R. Zentel
- H. Poths
- et al.
- 2003
- Polymers for Advanced Technologies
Chemically Amplified Imaging Materials Based on Electrophilic Aromatic Substitution: Poly[4-(acetoxymethyl)styrene-co-4-hydroxystyrene]
- Jean M.J. Frécnet
- Stephen Matuszczak
- et al.
- 2002
- Macromolecules
A Positive Tone Plasma-Developable Resist Obtained by Gas-Phase Image Reversal
- Scott A. MacDonald
- Nicholas J. Clecak
- et al.
- 2002
- Chemistry of Materials
Design of Polymeric Imaging Materials Based on Electrophilic Aromatic Substitution: Model Studies
- Harald D.H. Stöver
- Stephen Matuszczak
- et al.
- 2002
- Macromolecules
Synthesis and Polymerization of Alkyl -(Alkylsulfonyl)acrylates
- E. Gipstein
- C.G. Willson
- et al.
- 2002
- Journal of Organic Chemistry