Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for Ryan Deschner

A 0.127 μm² high performance 65 nm SOI based embedded DRAM for on-processor applications
- - G. Wang
  - K. Cheng
  - et al.
- 2006
- IEDM 2006
Optimization of DUV lithography for high-energy well implantation
- - Ryan Deschner
  - Seong-Dong Kim
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Characterization of imaging performance for immersion lithography at NA=0.93
- - Dario Gil
  - Jaione Tirapu-Azpiroz
  - et al.
- 2006
- SPIE Advanced Lithography 2006
Lithographic qualification of new opaque MoSi binary mask blank for the 32-nm node and beyond
- - Greg McIntyre
  - Michael Hibbs
  - et al.
- 2010
- J. Micro/Nanolithogr. MEMS MOEMS