Engineering neural networks for improved defect detection and classification
- Dhruv V. Patel
- Ravi Bonam
- et al.
- 2019
- SPIE Advanced Lithography 2019
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Deep learning-based detection, classification, and localization of defects in semiconductor processes
- Dhruv V. Patel
- Ravi Bonam
- et al.
- 2020
- J. Micro/Nanolithogr. MEMS MOEMS