Engineering neural networks for improved defect detection and classification
- Dhruv V. Patel
- Ravi Bonam
- et al.
- 2019
- SPIE Advanced Lithography 2019
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
4 results for Assad A. Oberai
A computational technique to optimally design in-situ diffractive elements: Applications to projection lithography at the resist resolution limit
- Gonzalo R. Feijóo
- Jaione Tirapu-Azpiroz
- et al.
- 2009
- SPIE Advanced Lithography 2009
Component-based workflows for parallel thermomechanical analysis of arrayed geometries
- Max O. Bloomfield
- Zhen Li
- et al.
- 2016
- Engineering with Computers
Deep learning-based detection, classification, and localization of defects in semiconductor processes
- Dhruv V. Patel
- Ravi Bonam
- et al.
- 2020
- J. Micro/Nanolithogr. MEMS MOEMS