Reactive radio frequency sputter deposition of higher nitrides of titanium, zirconium, and hafnium
- D.S. Yee
- J.J. Cuomo
- et al.
- 1986
- JVSTA
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13 results for Margaret A. Frisch
Effects of hydrogenation on lightly doped polycrystalline silicon
- D.R. Campbell
- J.C.M. Hwang
- et al.
- 1982
- Journal of Applied Physics
Thermodynamic properties of CF and CF2 from molecular flow effusion and mass spectrometer investigations
- Milton Farber
- Margaret A. Frisch
- et al.
- 1969
- Transactions of the Faraday Society