Relationship between substrate bias and microstructure in magnetron-sputtered AlCu films
- T. Lin
- K.Y. Ahn
- et al.
- 1987
- Thin Solid Films
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61 results for K.Y. Ahn
Effects of substrate temperature on copper distribution, resistivity, and microstructure in magnetron-sputtered Al-Cu films
- K.Y. Ahn
- T. Lin
- et al.
- 1987
- Thin Solid Films
Transport in refractory metals and their interaction with SiO2: Comparison of tungsten and molybdenum
- L. Krusin-Elbaum
- M.O. Aboelfotoh
- et al.
- 1987
- Thin Solid Films
A comparison of tungsten film deposition techniques for very large scale integration technology
- K.Y. Ahn
- 1987
- Thin Solid Films
Properties of reactively sputtered tungsten films in nitrogen and oxygen
- K.Y. Ahn
- S.B. Brodskv
- et al.
- 1986
- JVSTA
Effects of deposition methods on the temperature-dependent resistivity of tunasten films
- L. Krusin-Elbaum
- K.Y. Ahn
- et al.
- 1986
- JVSTA
Stress modification of WSi2.2 films by concurrent low energy ion bombardment during alloy evaporation
- D.S. Yee
- J. Floro
- et al.
- 1985
- JVSTA
Formation of TiSi2 and TiN during nitrogen annealing of magnetron sputtered Ti films
- E.D. Adams
- K.Y. Ahn
- et al.
- 1985
- JVSTA
Effects of biased cosputtering on resistivity and step coverage in tungsten silicide films
- K.W. Choi
- K.Y. Ahn
- 1985
- JVSTA
Structure and properties of coevaporated WSix films
- K.Y. Ahn
- S.R. Herd
- et al.
- 1985
- JVSTA