A critical comparison of silicide film deposition techniques
- K.Y. Ahn
- S. Basavaiah
- 1984
- Thin Solid Films
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Reactive etching mechanism of tungsten silicide in CF4-O2 plasma
- Young H. Lee
- Mao-Min Chen
- et al.
- 1984
- Thin Solid Films
Formation of an amorphous Rh-Si alloy by interfacial reaction between amorphous Si and crystalline Rh thin films
- S.R. Herd
- K.N. Tu
- et al.
- 1983
- Applied Physics Letters
Transmission electron microscopy for optical storage material analysis
- S.R. Herd
- K.Y. Ahn
- 1983
- Thin Solid Films
Fabrication and testing of trilayers with a high deposition rate plasma-polymerized spacer
- N.J. Mazzeo
- K.Y. Ahn
- et al.
- 1983
- Thin Solid Films
Investigation of Tin films reactively sputtered using a sputter gun
- K.Y. Ahn
- M. Wittmer
- et al.
- 1983
- Thin Solid Films
Formation and crystallization of amorphous silicides at the interface between thin metal and amorphous silicon films
- S.R. Herd
- K.Y. Ahn
- et al.
- 1983
- Thin Solid Films
High-sensitivity silicide films for optical recording
- K.Y. Ahn
- T.H. Distefano
- et al.
- 1982
- Journal of Applied Physics
Laser writing on silicon-metal bilayers for optical storage. II. Microscopic study
- S.R. Herd
- K.N. Tu
- et al.
- 1982
- Journal of Applied Physics
Laser writing on metal-silicon bilayers for optical storage. I. Optical properties
- K.Y. Ahn
- T.H. Di Stefano
- et al.
- 1982
- Journal of Applied Physics