Multilayer At03-Si02Combination (MASC) Films as a Partial H2 Diffusion Barrier for Use on Ge Surfaces
- Thomas O. Sedgwick
- Joseph A. Aboaf
- 1968
- IEEE T-ED
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Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum Alkoxide
- J.A. Aboaf
- 1967
- JES