Performance of multilayer dispersion elements from 80 to 500 ev
- R.J. Bartlett
- D.R. Kania
- et al.
- 1989
- Proceedings of SPIE 1989
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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61 results for E. Spiller
Fabrication of free-standing x-ray transmission gratings and zone plates
- Y. Vladimirsky
- E. Kallne
- et al.
- 1989
- Proceedings of SPIE 1989
Imaging performance of a normal incidence x-ray telescope measured at 0.18 kev
- J.P. Henry
- Eberhard Spiller
- et al.
- 1989
- Proceedings of SPIE 1989
Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- Ivan Haller
- Ralph Feder
- et al.
- 2019
- JES
Specimen replication for electron microscopy using x rays and x-ray resist
- Ralph Feder
- David Sayre
- et al.
- 2008
- Journal of Applied Physics
Application of synchrotron radiation to x-ray lithography
- E. Spiller
- D.E. Eastman
- et al.
- 2008
- Journal of Applied Physics
Smooth multilayer films suitable for x-ray mirrors
- Rolf-Peter Haelbich
- Armin Segmüller
- et al.
- 2008
- Applied Physics Letters
Controlled fabrication of multilayer soft-x-ray mirrors
- Eberhard Spiller
- Armin Segmüller
- et al.
- 2008
- Applied Physics Letters
X‐ray lithography
- R. Feder
- E. Spiller
- et al.
- 2004
- Polymer Engineering & Science
Saturable optical resonator
- Eberhard Spiller
- 2003
- Journal of Applied Physics