The sputtering of PtSi and NiSi
- J.M. Poate
- W.L. Brown
- et al.
- 1976
- Nuclear Instruments and Methods
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44 results for J.W. Mayer
Structure and growth kinetics of Ni2Si on silicon
- K.N. Tu
- W.K. Chu
- et al.
- 1975
- Thin Solid Films
Implanted noble gas atoms as diffusion markers in silicide formation
- W.K. Chu
- S.S. Lau
- et al.
- 1975
- Thin Solid Films
Evaluation of glancing angle X-ray diffraction and MeV 4He backscattering analyses of silicide formation
- S.S. Lau
- W.K. Chu
- et al.
- 1974
- Thin Solid Films