1 µm MOSFET VLSI Technology: Part VII-Metal Silicide Interconnection Technology—A Future Perspective
- Billy L. Crowder
- Stanley Zirinsky
- 1979
- IEEE JSSC
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8 results for S. Zirinsky
Interactions Between Cr and Pt Films: New Cr-Pt Phases
- J.E.E. Baglin
- F.M. d'Heurle
- et al.
- 2019
- JES
Selective Studies of Chemical Vapor-Deposited Aluminum Nitride-Silicon Nitride Mixture Films
- S. Zirinsky
- E.A. Irene
- 2019
- JES
The Etching of Crystallographically Determined Orifices in Sapphire
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
Oxidation mechanisms in WSi2 thin films
- S. Zirinsky
- W.N. Hammer
- et al.
- 2008
- Applied Physics Letters
1 µm MOSFET VLSI Technology: Part VII—Metal Silicide Interconnection Technology—A Future Perspective
- Billy L. Crowder
- Stanley Zirinsky
- 1979
- IEEE T-ED
Chemical vapor deposition of AlxOyNz films
- V.J. Silvestri
- E.A. Irene
- et al.
- 1975
- Journal of Electronic Materials
Charge transfer properties of mnos structures as influenced by processing parameters
- S. Zirinsky
- 1975
- Journal of Electronic Materials