Leveraging data analytics, patterning simulations and metrology models to enhance CD metrology accuracy for advanced IC nodes
- Narender Rana
- Yunlin Zhang
- et al.
- 2014
- SPIE Advanced Lithography 2014
Publications
9084 results for Computer Science
Estimating pattern sensitivity to the printing process for varying dose/focus conditions for RET development in the sub-22nm era
- Benoit Seguin
- Henri Saab
- et al.
- 2014
- SPIE Advanced Lithography 2014
Towards electrical testable soi devices using directed self-assembly for fin formation
- Chi Chun Liu
- Cristina Estrada-Raygoza
- et al.
- 2014
- SPIE Advanced Lithography 2014
Spin-on organic hardmask for topo-patterned substrate
- Kazuhiko Komura
- Yoshi Hishiro
- et al.
- 2014
- SPIE Advanced Lithography 2014
Mathematical programming: Turing completeness and applications to software analysis
- Leo Liberti
- Fabrizio Marinelli
- 2014
- J Combin Optim
GLB: Lifeline-based global load balancing in X10
- Wei Zhang
- Olivier Tardieu
- et al.
- 2014
- PPoPP 2014
Equivalent networks for medium-term hydro-thermal scheduling with variable head cascaded reservoirs and transmission constraints
- C.H. Fujisawa
- L. S.A. Martins
- et al.
- 2014
- PSCC 2014
Optimal bounds on approximation of submodular and XOS functions by juntas
- Vitaly Feldman
- Jan Vondrak
- 2014
- ITA 2014
On the riddle of coding equality function in the garden hose model
- Oded Margalit
- 2014
- ITA 2014
Network topology and parameter estimation: From experimental design methods to gene regulatory network kinetics using a community based approach
- Pablo Meyer
- Thomas Cokelaer
- et al.
- 2014
- BMC Systems Biology