Reactive etching mechanism of tungsten silicide in CF4-O2 plasma
- Young H. Lee
- Mao-Min Chen
- et al.
- 1984
- Thin Solid Films
Publications
14443 results for Physical Sciences
A critical comparison of silicide film deposition techniques
- K.Y. Ahn
- S. Basavaiah
- 1984
- Thin Solid Films
Computer simulation of vacancy migration in a fcc tilt boundary
- Thomas Kwok
- Paul S. Ho
- et al.
- 1984
- Surface Science
Phase diagram and phase transitions of krypton on graphite in the one-to-two-layer regime
- E.D. Specht
- M. Sutton
- et al.
- 1984
- Physical Review B
Escape-energy distribution for particles in an extremely underdamped potential well
- M. B̈ttiker
- R. Landauer
- 1984
- Physical Review B
Critical behavior of the p-component Potts model with correlated impurities
- B. Stolan
- E. Pytte
- et al.
- 1984
- Physical Review B
Resolution of the scanning tunnel microscope
- E. Stoll
- 1984
- Surface Science
Molecular beam studies of the dynamics of activated adsorption of N2 on W(110): Dissociation threshold and new binding states
- J. Lee
- R.J. Madix
- et al.
- 1984
- Surface Science
Linear integral equations and renormalization group
- W. Klein
- A.D. Haymet
- 1984
- Physical Review B
Critical behavior of the one-dimensional S=1 XY model with single-ion anisotropy
- O.F. De Alcantara Bonfim
- T. Schneider
- 1984
- Physical Review B