Generation of coherent extreme ultraviolet and vacuum ultraviolet radiation using pulsed nozzles
- Charles T. Rettner
- Ernesto E. Marinero
- et al.
- 1989
- Proceedings of SPIE 1989
Publications
14443 results for Physical Sciences
Effect of developer composition on photoresist performance
- William D. Hinsberg
- Monica L. Gutierrez
- 1989
- Proceedings of SPIE 1989
High resolution polymer pattern fabrications with Low energy proton beams
- H. Hiraoka
- 1984
- Microlithography 1984
Polysilane Bilayer UV Lithography
- Donald C. Hofer
- Robert D. Miller
- et al.
- 1989
- Proceedings of SPIE 1989
Contrast enhanced UV lithography with polysilanes
- Donald C. Hofer
- Robert D. Miller
- et al.
- 1984
- Microlithography 1984
Helium diffraction from adsorbate-covered surfaces: A study of the O-Ni(001) system
- Inder P. Batra
- J.A. Barker
- 1984
- Physical Review B
Parallel and perpendicular multilayer relaxation of Fe{310}
- J. Sokolov
- F. Jona
- et al.
- 1984
- Physical Review B
Molecular-dynamics studies of grain-boundary diffusion. I. Structural properties and mobility of point defects
- Thomas Kwok
- Paul S. Ho
- et al.
- 1984
- Physical Review B
Photoemission study of WC(0001)
- P.M. Stefan
- M.L. Shek
- et al.
- 1984
- Physical Review B
Electronic states of oxygen in gallium phosphide
- T.N. Morgan
- 1984
- Physical Review B