Your worst Nightmare - Inspection of aggressive OPC on 14 nm masks with emphasis on defect sensitivity and wafer defect print predictability
- Karen D. Badger
- Michael Hibbs
- et al.
- 2013
- SPIE Photomask Technology 2013
Publications
9084 results for Computer Science
A robot-in-the-loop face detection and recognition system with coordinaive control platform
- Xiaohan Li
- Yu Cheng
- et al.
- 2013
- ROBIO 2013
Two-dimensional mask effects at the 14 nm logic node
- A.E. Zweber
- A.E. McGuire
- et al.
- 2013
- SPIE Photomask Technology 2013
Enabling distributed key-value stores with low latency-impact snapshot support
- Jorda Polo
- Yolanda Becerra
- et al.
- 2013
- NCA 2013
Exploring activeness of users in QA forums
- Vibha Singhal Sinha
- Senthil Mani
- et al.
- 2013
- MSR 2013
Thermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
A network of rails: A graph dataset of ruby on rails and associated projects
- Patrick Wagstrom
- Corey Jergensen
- et al.
- 2013
- MSR 2013
A dynamic algorithm for facilitated charging of plug-in electric vehicles
- Nicole Taheri
- Robert Entriken
- et al.
- 2013
- IEEE Transactions on Smart Grid
On interconnected systems, passivity and some generalisations
- Rodrigo H. Ordóñez-Hurtado
- Wynita M. Griggs
- et al.
- 2013
- International Journal of Control
Cooperative regulation and trading of emissions using plug-in hybrid vehicles
- Arieh Schlote
- Florian Häusler
- et al.
- 2013
- IEEE T-ITS