Publications

2357 results at Journal of Applied Physics

Two-dimensional profiling of shallow junctions in Si metal-oxide-semiconductor structures using scanning tunneling spectroscopy and transmission electron microscopy
- - E.T. Yu
  - K. Barmak
  - et al.
- 1996
- Journal of Applied Physics
Three-dimensional imaging with a nuclear magnetic resonance force microscope
- - O. Züger
  - S.T. Hoen
  - et al.
- 1996
- Journal of Applied Physics
Amorphous (Mo, Ta, or W)-Si-N diffusion barriers for Al metallizations
- - J.S. Reid
  - E. Kolawa
  - et al.
- 1996
- Journal of Applied Physics
Hydrogen incorporation in silicon nitride films deposited by remote electron-cyclotron-resonance chemical vapor deposition
- - David E. Kotecki
  - Jonathan D. Chapple-Sokol
- 1995
- Journal of Applied Physics
Interface states induced by the presence of trapped holes near the silicon-silicon-dioxide interface
- - D.J. DiMaria
  - D.A. Buchanan
  - et al.
- 1995
- Journal of Applied Physics
In situ scanning electron microscope comparison studies on electromigration of Cu and Cu(Sn) alloys for advanced chip interconnects
- - K.-L. Lee
  - C.-K. Hu
  - et al.
- 1995
- Journal of Applied Physics
Investigation of titanium silicide formation in Ti+Si reactions using infrared spectroscopy and x-ray diffraction
- - K.L. Saenger
  - C. Cabral Jr.
  - et al.
- 1995
- Journal of Applied Physics
Role of the chamber wall in low-pressure high-density etching plasmas
- - James A. O'Neill
  - Jyothi Singh
- 1995
- Journal of Applied Physics
Finite-element stress analysis of failure mechanisms in a multilevel metallization structure
- - L.T. Shi
  - K.N. Tu
- 1995
- Journal of Applied Physics
Characterizing, modeling, and optimizing high-T_c superconducting quantum interference devices
- - V. Foglietti
  - R.H. Koch
  - et al.
- 1995
- Journal of Applied Physics