The trade-offs between thin and thick absorbers for EUV photomasks
- Gregory McIntyre
- Christian Zuniga
- et al.
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Publications
14341 results for Physical Sciences
Using custom features to check OPC model performance
- Amr Abdo
- Ramya Viswanathan
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Total Source Mask Optimization: High-capacity, resist modeling, and production-ready mask solution
- Moutaz Fakhry
- Yuri Granik
- et al.
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Atomic-scale transport in epitaxial graphene
- Shuai-Hua Ji
- James B. Hannon
- et al.
- 2011
- Nature Materials
Connectivity of edge and surface states in topological insulators
- Yongjin Jiang
- Feng Lu
- et al.
- 2011
- Physical Review B - CMMP
Low-temperature epitaxy of compressively strained silicon directly on silicon substrates
- Davood Shahrjerdi
- Bahman Hekmatshoar
- et al.
- 2011
- Journal of Electronic Materials
Infrared spectroscopy of wafer-scale graphene
- Hugen Yan
- Fengnian Xia
- et al.
- 2011
- ACS Nano
Charge trapping and scattering in epitaxial graphene
- Damon B. Farmer
- Vasili Perebeinos
- et al.
- 2011
- Physical Review B - CMMP
Coherent control of a superconducting qubit with dynamically tunable qubit-cavity coupling
- Anthony J. Hoffman
- Srikanth J. Srinivasan
- et al.
- 2011
- Physical Review B - CMMP
Topographically directed self-assembly of goldnanoparticles
- Qiu Dai
- Charles T. Rettner
- et al.
- 2011
- Journal of Materials Chemistry