Surface grid technique for noncontact e-beam testing of very large scale integrated package substrate
- Kam-Leung Lee
- C.H. Schaefer
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.