CVD Co capping layers for Cu/low-k interconnects: Cu em enhancement vs. Co thickness
- C.-C. Yang
- F. Baumann
- et al.
- 2011
- IITC/MAM 2011
Publications
14341 results for Physical Sciences
Future of PECVD and spin-on ultra low-k materials
- Willi Volksen
- Theo Frot
- et al.
- 2011
- IITC/MAM 2011
Optimization of porous ultra low- dielectrics (κ≤ 2.55) for 28nm generation
- D. Kioussis
- E.T. Ryan
- et al.
- 2011
- IITC/MAM 2011
Single-molecule chemistry and physics explored by low-temperature scanning probe microscopy
- Ingmar Swart
- Leo Gross
- et al.
- 2011
- Chemical Communications
Graphene flash memory
- Augustin J. Hong
- Emil B. Song
- et al.
- 2011
- ACS Nano
Directed placement of gold nanorods using a removable template for guided assembly
- Felix Holzner
- Cyrill Kuemin
- et al.
- 2011
- Nano Letters
Modular functionalization of electrodes by cross-coupling reactions at their surfaces
- Marcel Müri
- Bernd Gotsmann
- et al.
- 2011
- Advanced Functional Materials
Ion implantation induced modification of structural and magnetic properties of perpendicular media
- Nikita Gaur
- S.N. Piramanayagam
- et al.
- 2011
- Journal of Physics D: Applied Physics
In vivo and in vitro tracking of erosion in biodegradable materials using non-invasive fluorescence imaging
- Natalie Artzi
- Nuria Oliva
- et al.
- 2011
- Nature Materials
The formation of chlorine-induced alterations in daguerreotype image particles: A high resolution SEM-EDS study
- Silvia A. Centeno
- Franziska Schulte
- et al.
- 2011
- Applied Physics A: Materials Science and Processing