Selective dry etching of silicon with respect to germanium
- G.S. Oehrlein
- T.D. Bestwick
- et al.
- 1990
- Applied Physics Letters
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2344 results at Applied Physics Letters
Crossover from tunneling to metallic behavior in superconductor- semiconductor contacts
- A.W. Kleinsasser
- T.N. Jackson
- et al.
- 1990
- Applied Physics Letters
Ultrafast time resolution in scanned probe microscopies
- R.J. Hamers
- David G. Cahill
- 1990
- Applied Physics Letters
Bias stress-induced instabilities in amorphous silicon nitride/hydrogenated amorphous silicon structures: Is the "carrier-induced defect creation" model correct?
- A. Gelatos
- Jerzy Kanicki
- 1990
- Applied Physics Letters
Comparison of the selective adsorption and reactivity behavior of WF 6 and TaF5 on SiO2 and polyimide surfaces
- F.R. McFeely
- L.J. Terminello
- et al.
- 1990
- Applied Physics Letters
Proximity effect in electron beam patterned x-ray masks
- C.P. Umbach
- A.N. Broers
- 1990
- Applied Physics Letters
Epitaxy of (100) Cu on (100) Si by evaporation near room temperatures: In-plane epitaxial relation and channeling analysis
- Chin-An Chang
- Joyce C. Liu
- et al.
- 1990
- Applied Physics Letters
Mechanism of picosecond ultraviolet laser sputtering of sapphire at 266 nm
- J.L. Brand
- A.C. Tam
- 1990
- Applied Physics Letters
Exponential thermal emission transients from DX centers in heavily Si-doped GaAs
- E. Calleja
- P.M. Mooney
- et al.
- 1990
- Applied Physics Letters
Fractional states in few-electron systems
- W. Hansen
- T.P. Smith III
- et al.
- 1990
- Applied Physics Letters